SPIRE Technical Solutions


Harness Assy, CH INTCN jumper,	Harness Assy, CVD/Tungsten Chamber	Harness Assy, DC PWR Mother BD - Disk PWR
Part Number: 0140-21726	Part Number: 0140-09223	Part Number: 0140-20035


Harness Assy, Door INTLK SWTCH	Harness Assy, Dual 5 phase driver	Harness ASSY, Ebara monolith pump
Part Number: 0140-76316	Part Number: 0140-76622	Part Number: 0140-20283


Harness Assy, EMO Satelite Box	Harness Assy, Exhaust INTLK	Harness ASSY, H2 sensor interlock, CVD
Part Number: 0140-70192	Part Number: 0140-00961	Part Number: 0140-21313


Harness ASSY, H2O flow CH1–4	Harness Assy, HTESC, STD Body, POS 1 & 4, AC	Harness Assy, IGL/ISSG Intfc
Part Number: 0140-21528	Part Number: 0140-14911	Part Number: 0140-07777

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