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| Gas distribution plate | Gas Lin, Chamber 1(Heater), WB, Upper, Mixed | Gas Line #1 Ch.C PCII |
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Part Number: 0020-31490
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Part Number: 0050-76606
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Part Number: 0050-70091
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| GAS LINE CHAMBER 1 (HEATER) MF | GAS LINE CHAMBER 1 (HEATER) MF | GAS LINE CHAMBER 1 (PROCESS) M |
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Part Number: 0050-20065
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Part Number: 0050-20064
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Part Number: 0050-20066
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| Gas line NO.3 preclean Used | Gas Line, Chamber 1(Heater) MFC 17, Mixed | Gas line, top vent, narrow left |
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Part Number: 0190-20015-U
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Part Number: 0050-76605
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Part Number: 0050-76118
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| Gas line, top vent, narrow rig | Gas manifold output 200mm TXZ | Gas manifold output 200mm TXZ |
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Part Number: 0050-76117
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Part Number: 0040-02938-N
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Part Number: 0040-02938-U
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Spire Technical Solutions
9601 Dessau Rd, Suite 105
Austin, TX 78754
CALL US: 512-386-1070
FAX: 512-386-1067
E-Mail Sales at sales@spire-tec.com
E-Mail Staff at engineering@spire-tec.com
9601 Dessau Rd, Suite 105
Austin, TX 78754
CALL US: 512-386-1070
FAX: 512-386-1067
E-Mail Sales at sales@spire-tec.com
E-Mail Staff at engineering@spire-tec.com
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