SPIRE Technical Solutions


A601065 Pfeiffer Vacuum Bracket	AC cover low temp ESC ground block	AC Cover, Chambers C, D, E, F
Part Number: A001-1126	Part Number: 0040-00959	Part Number: 0020-20790


AC outlet system assy	Act Rtry 280 Deg1-3/4 Bore, Dbl Vane, Sgl Shaft	Actr Rtry 180Deg-Rot 80mm Bore 1/4 NPT Sgl-Vane&Sft
Part Number: 0010-21799	Part Number: 0520-01009	Part Number: 0520-01017


ADAPTER 11.3" SOURCE WIDE BODY CHAMBER	ADAPTER 11.3" SOURCE WIDE BODY CHAMBER	ADAPTER 13" SOURCE WIDE BODY CHAMBER
Part Number: 0020-22547	Part Number: 0020-22547 N	Part Number: 0020-23046


Adapter PVD water lines on board CRYO	ADAPTER RING, PUMPING PLATE, 200MM COMMON SILANE	ADAPTER SOURCE 13"
Part Number: 0020-22263-U	Part Number: 0200-30287	Part Number: 0020-23042

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