SPIRE Technical Solutions


Cover, Orienter/Degas	Cover, RF enclosure cable inte	Cover, rotation, left, RTP chamber
Part Number: 0040-03733	Part Number: 0040-22812	Part Number: 0020-39409


Cover, rotation, rear, RTP chamber	COVER, SHIELD CATHODE BASE LIFT, ULTIMA	Cover, shipping PC MOD for Gas
Part Number: 0020-39407	Part Number: 0020-18949	Part Number: 0040-22592


Cover, Throttle Drive	Cover, throttle valve, DXZ	Cover, top, Multi-slot Cooldown.
Part Number: 0020-10004	Part Number: 0040-38931	Part Number: 0021-01730


COVER, TOP, REAR ENDURA	cover, transfer chamber lid	Cover, TXZ DRV belt heater lift
Part Number: 0040-23909	Part Number: 0040-48246	Part Number: 0021-01963

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