SPIRE Technical Solutions


Cover, RF enclosure cable inte	Cover, rotation, left, RTP chamber	Cover, rotation, rear, RTP chamber
Part Number: 0040-22812	Part Number: 0020-39409	Part Number: 0020-39407


COVER, SHIELD CATHODE BASE LIFT, ULTIMA	Cover, shipping PC MOD for Gas	Cover, Throttle Drive
Part Number: 0020-18949	Part Number: 0040-22592	Part Number: 0020-10004


Cover, throttle valve, DXZ	Cover, top, Multi-slot Cooldown.	COVER, TOP, REAR ENDURA
Part Number: 0040-38931	Part Number: 0021-01730	Part Number: 0040-23909


cover, transfer chamber lid	Cover, TXZ DRV belt heater lift	Cover, wafer orienter controller PCBA
Part Number: 0040-48246	Part Number: 0021-01963	Part Number: 0020-44559

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