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| COVER, SHIELD CATHODE BASE LIFT, ULTIMA | Cover, shipping PC MOD for Gas | Cover, Throttle Drive |
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Part Number: 0020-18949
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Part Number: 0040-22592
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Part Number: 0020-10004
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| Cover, throttle valve, DXZ | Cover, top, Multi-slot Cooldown. | COVER, TOP, REAR ENDURA |
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Part Number: 0040-38931
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Part Number: 0021-01730
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Part Number: 0040-23909
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| cover, transfer chamber lid | Cover, TXZ DRV belt heater lift | Cover, wafer orienter controller PCBA |
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Part Number: 0040-48246
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Part Number: 0021-01963
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Part Number: 0020-44559
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| Cover, window PVD chamber | CPL floating joint 1/2–20 unf. 1.61 OD | CPLG FLOATING JOINT 1/2-2 |
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Part Number: 0020-70500
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Part Number: 3220-01051
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Part Number: 3320-01051-N
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Spire Technical Solutions
9601 Dessau Rd, Suite 105
Austin, TX 78754
CALL US: 512-386-1070
FAX: 512-386-1067
E-Mail Sales at sales@spire-tec.com
E-Mail Staff at engineering@spire-tec.com
9601 Dessau Rd, Suite 105
Austin, TX 78754
CALL US: 512-386-1070
FAX: 512-386-1067
E-Mail Sales at sales@spire-tec.com
E-Mail Staff at engineering@spire-tec.com
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