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SHLD HTR RF top
Short DC bias ASSY
Short Feed Lamp
SHLD HTR RF top Short DC bias ASSY Short Feed Lamp
Part Number: 0020-20512
Part Number: 0010-20511
Part Number: 0040-20292-U
 
SHROUD, WATER LINE PROTECTION FOR LOWER CLAMP RING
shutter enclosure
SIP Magnet, Assembly
SHROUD, WATER LINE PROTECTION FOR LOWER CLAMP RING shutter enclosure SIP Magnet, Assembly
Part Number: 0020-15965
Part Number: 0020-22879
Part Number: 0010-04065
 
Skirt level adjustment
Sleeved Cap, Ext Reach
Slip–hinge, female, rear step
Skirt level adjustment Sleeved Cap, Ext Reach Slip–hinge, female, rear step
Part Number: 0010-01245
Part Number: 0040-13384-C
Part Number: 0020-21070
 
Slip–hinge, male, rear step
Slit Valve Assembly, Actuator, Ultima HDP-CVD
SLIT VALVE BELLOWS
Slip–hinge, male, rear step Slit Valve Assembly, Actuator, Ultima HDP-CVD SLIT VALVE BELLOWS
Part Number: 0020-21069
Part Number: 0010-15287
Part Number: 0040-20418-U

Parts Inventory