SPIRE Technical Solutions


Harness Assy, Water Flow Intlk, CVD	Harness ASSY, WB chamber interconnect	Harness Assy, WB Chamber POS 3
Part Number: 0140-21804	Part Number: 0140-70173	Part Number: 0140-70152


Harness Assy, With Jumper DTLR Status GPLIS	Harness ASSY,chamber 3	Harness VHP robot
Part Number: 0140-38445	Part Number: 0140-20100	Part Number: 0140-70352


Harness, 13.56MHZ match integration	Harness, AC power dual blade	Harness, CH A interconnect
Part Number: 0150-22451	Part Number: 0140-20832	Part Number: 0140-20101


HARNESS, DI EXTENSION LINE	Harness, VHP TRANS CH DD motor	HDL RND 4" long 2" high SST 1/2" thick 5/16–18 THD
Part Number: 0140-10010	Part Number: 0140-76327	Part Number: 3370-01029

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