SPIRE Technical Solutions


Pin, lift, heater, DXZ	Pin, lift, heater, WXZ	Pin, PCII lift
Part Number: 0200-10284	Part Number: 0200-09716	Part Number: 0020-22839


Pin, Sensor/Guide K3/P4 Source	Pin, wafer lift, centura, DXZ	Pivot Transfer Slit Valve
Part Number: 0020-28647	Part Number: 0200-10162	Part Number: 0020-20342


PIVOT, ONE PIECE LEFT	PIVOT, ONE PIECE RIGHT	Plate 18KW PWRSP cord STRN RLF
Part Number: 0020-70271-C	Part Number: 0020-70272-C	Part Number: 0020-70781


Plate adapter clamp	Plate adapter clamp G–12	Plate adapter clamp wide body
Part Number: 0020-38105	Part Number: 0020-23836	Part Number: 0020-22805

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