SPIRE Technical Solutions


Blank slit valve	Blank, Face A-B-C-D	Blank, Flange, Process Chamber, Monolith
Part Number: 0020-35077	Part Number: 0020-35079	Part Number: 0020-20557


Blank, shutter	BLANKOFF AC REM CONTRL BULKHEAD	Blankoff HTESC PWR Supply
Part Number: 0021-70380	Part Number: 0020-25690	Part Number: 0040-23472


BLANKOFF, CONTROLLER RACK	Blank–off position E, 200mm en	Block Gas Spring Fixture
Part Number: 0020-18289	Part Number: 0040-87211	Part Number: 0020-20292


Block Mnt, Shut Off, APTech	Block mounting area FC780C MFC	Block mounting heater motorized lift
Part Number: 0020-22542	Part Number: 0020-26020	Part Number: 0020-23437

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