SPIRE Technical Solutions


Cover Ring SST 8" 101 Coverage	COVER RING, 8" IMP/BESC CERAMIC W/AL ARC REV 002	Cover Safety Orienter @ POS #5
Part Number: 0020-24914	Part Number: 0200-00673	Part Number: 0020-24363


COVER SLD EXHAUST	Cover source 11.30"	Cover Switch w/Connector
Part Number: 0020-39907	Part Number: 0030-20007	Part Number: 0020-21043


cover, baseplate, exhaust bottom	COVER, BLANK-OFF, GASBOX EXHAUST	Cover, chamber A/B interconnect BD
Part Number: 0040-46907	Part Number: 0020-20625	Part Number: 0020-21091


COVER, CHAMBER A/B POSITON	Cover, chamber interconnect BD	Cover, CVD Lamp Driver
Part Number: 0021-70280	Part Number: 0020-21089	Part Number: 0020-24982

Products Map