SPIRE Technical Solutions


Cover Safety Orienter @ POS #5	COVER SLD EXHAUST	Cover source 11.30"
Part Number: 0020-24363	Part Number: 0020-39907	Part Number: 0030-20007


Cover Switch w/Connector	cover, baseplate, exhaust bottom	COVER, BLANK-OFF, GASBOX EXHAUST
Part Number: 0020-21043	Part Number: 0040-46907	Part Number: 0020-20625


Cover, chamber A/B interconnect BD	COVER, CHAMBER A/B POSITON	Cover, chamber interconnect BD
Part Number: 0020-21091	Part Number: 0021-70280	Part Number: 0020-21089


Cover, CVD Lamp Driver	Cover, EXT EMO FI	Cover, Front Leg
Part Number: 0020-24982	Part Number: 0040-96887-C	Part Number: 0020-20817

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