SPIRE Technical Solutions


Ceramic, Isolator Cap	CHAMBER 200MM SACVD	CHAMBER 4 INTERCONNECT CABLE
Part Number: 0200-10486-U	Part Number: 0040-09221	Part Number: 0150-21342


Chamber A Return water hose as	Chamber A Supply water hose as	Chamber A water manifold RTN
Part Number: 0010-06370	Part Number: 0010-06366	Part Number: 0010-03941


Chamber A water manifold SPLY	Chamber A WTR manifold RETURN	Chamber B Return WTR hose assy
Part Number: 0010-03953	Part Number: 0010-03952	Part Number: 0010-06371


Chamber Cover, Top	Chamber interconnect cover WB	Chamber Interconnect PCB
Part Number: 0020-75140	Part Number: 0020-70821	Part Number: 0100-20004--2370-C

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