SPIRE Technical Solutions


Ceramic pin	Ceramic, Isolator Cap	Ceramic, Isolator Cap
Part Number: 0200-20444	Part Number: 0200-10486-R-T	Part Number: 0200-10486-U


CHAMBER 200MM SACVD	CHAMBER 4 INTERCONNECT CABLE	Chamber A Return water hose as
Part Number: 0040-09221	Part Number: 0150-21342	Part Number: 0010-06370


Chamber A Supply water hose as	Chamber A water manifold RTN	Chamber A water manifold SPLY
Part Number: 0010-06366	Part Number: 0010-03941	Part Number: 0010-03953


Chamber A WTR manifold RETURN	Chamber B Return WTR hose assy	Chamber Cover, Top
Part Number: 0010-03952	Part Number: 0010-06371	Part Number: 0020-75140

Products Map