SPIRE Technical Solutions


Ceramic, Isolator Cap	Ceramic, Isolator Cap	CHAMBER 200MM SACVD
Part Number: 0200-10486-R-T	Part Number: 0200-10486-U	Part Number: 0040-09221


CHAMBER 4 INTERCONNECT CABLE	Chamber A Return water hose as	Chamber A Supply water hose as
Part Number: 0150-21342	Part Number: 0010-06370	Part Number: 0010-06366


Chamber A water manifold RTN	Chamber A water manifold SPLY	Chamber A WTR manifold RETURN
Part Number: 0010-03941	Part Number: 0010-03953	Part Number: 0010-03952


Chamber B Return WTR hose assy	Chamber Cover, Top	Chamber interconnect cover WB
Part Number: 0010-06371	Part Number: 0020-75140	Part Number: 0020-70821

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