SPIRE Technical Solutions


Chamber A water manifold SPLY	Chamber A WTR manifold RETURN	Chamber B Return WTR hose assy
Part Number: 0010-03953	Part Number: 0010-03952	Part Number: 0010-06371


Chamber Cover, Top	Chamber interconnect cover WB	Chamber Interconnect PCB
Part Number: 0020-75140	Part Number: 0020-70821	Part Number: 0100-20004--2370-C


Chamber Interconnect PCB	Chamber interconnect PCB	CHAMBER PORT ASSY, ENHANCED, CENTURA AP
Part Number: 0100-20004--2350-026-C	Part Number: 0100-20313	Part Number: 0010-27715


Chamber Post assy	Chassis, HTESC Hi-Voltage	CHE,F COVER
Part Number: 0010-05955	Part Number: 0190-13067	Part Number: 0020-70823

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