SPIRE Technical Solutions


Harness ASSY chamber 3 and 4 I/C	Harness assy DC PWR 2nd set disk drive	Harness Assy Ext PCII w/Cryo-Mod
Part Number: 0140-20541	Part Number: 0140-20656	Part Number: 0140-20730


Harness ASSY high-efficiency match	Harness ASSY interconnect	Harness ASSY lift up/down sens
Part Number: 0140-21406	Part Number: 0140-02009	Part Number: 0140-20504


HARNESS ASSY LIMIT SW	Harness ASSY loader LLOCK B cassette POS	Harness ASSY Omega sensor signal TAP EN
Part Number: 0150-09099	Part Number: 0140-20531	Part Number: 0140-19753


Harness ASSY PCII CHBR match interlock	HARNESS ASSY REMOTE GAS DIST VME COM	HARNESS ASSY RS232 WAFER ORIENTER
Part Number: 0140-20710	Part Number: 0140-20737	Part Number: 0140-76016

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