SPIRE Technical Solutions


ASSY, source locking pin	ASSY, Source Locking Pin	Assy, TC AMP & Overtemp INTLK, DXZ
Part Number: 0010-01100	Part Number: 0010-01100-U	Part Number: 0090-39174


Assy, Thermocouple MCVD	ASSY, THERMOCOUPLE, DXZ	Assy, Top Cover w/Fan, HYMU 200mm Ultima
Part Number: 0190-35511	Part Number: 0190-35413	Part Number: 0010-17770


ASSY, upper DC housing w/buss	ASSY, upper DC housing w/buss bar	ASSY,CHAMBER BLANK
Part Number: 0010-21803-N	Part Number: 0010-21803-U	Part Number: SP-SBWH-002


ASSY,TC ISO AMP	Autonics 5-Phase Driver Mounting Adapter Bracket	Autonics 5-Phase Driver Mounting Adapter Bracket (CLONE)
Part Number: 0010-21699	Part Number: SP-24061	Part Number: SP-240611

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