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Wafer C lexan viewport
Blade, 6" HTHU buffer
Cap 6" buffer robot
Wafer C lexan viewport Blade, 6" HTHU buffer Cap 6" buffer robot
Part Number: 0020-75093
Part Number: 0020-76719
Part Number: 0020-21113
 
Spares, 6" buffer blade ASSY W/CNTNR
Bracket mounting 2–phase driver
Harness ASSY AC 2–phase driver
Spares, 6" buffer blade ASSY W/CNTNR Bracket mounting 2–phase driver Harness ASSY AC 2–phase driver
Part Number: 0240-75098-USED
Part Number: 0020-23487
Part Number: 0140-20502
 
Cable ASSY 2–phase driver output
Cable ASSY 2–phase driver input
Driver 2–phase stepper motor
Cable ASSY 2–phase driver output Cable ASSY 2–phase driver input Driver 2–phase stepper motor
Part Number: 0150-20640
Part Number: 0150-20639
Part Number: 0870-01003-USED
 
Blade ASSY 8" buffer
System expansion board w/bracket
Harness, VHP TRANS CH DD motor
Blade ASSY 8" buffer System expansion board w/bracket Harness, VHP TRANS CH DD motor
Part Number: 0010-20130
Part Number: 0100-20152
Part Number: 0140-76327

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