SPIRE Technical Solutions


Cassette Support	Pedestal CD/PT Wafer 150mm	Plate adapter clamp wide body
Part Number: 0020-22739	Part Number: 0020-22799	Part Number: 0020-22805


Preclean Lift Hoop	Pin, PCII lift	Bell jar adapter
Part Number: 0020-22838	Part Number: 0020-22839	Part Number: 0020-22848


shutter enclosure	Adapter, collimator source 13"	Insulator TiN 8" Wafer
Part Number: 0020-22879	Part Number: 0020-22950	Part Number: 0020-22975


Plate contact DC right TiN 8" wafer	Plate contact DC, left TiN 8" wafer	ADAPTER TIN 8” WAFER CHAMBER 16”
Part Number: 0020-22979	Part Number: 0020-22980	Part Number: 0020-22982

Used