SPIRE Technical Solutions


Plate contact DC source 13" R	Plate contact DC source 13" left	Plate contact DC source 11.3" left
Part Number: 0020-21482	Part Number: 0020-21485	Part Number: 0020-21486


Plate contact, DC source 11.3" right	Insulator Source 13"	Loadlock shield bracket
Part Number: 0020-21488	Part Number: 0020-21664-U	Part Number: 0020-21674


ARM, Lifter, Degas/ orienter	Block, Laser	Lifter 6"
Part Number: 0020-21675	Part Number: 0020-21693	Part Number: 0020-21705


Chuck Orienter 6"	8" Orienter Lifter	8" Orienter Chuck
Part Number: 0020-21706	Part Number: 0020-21707	Part Number: 0020-21708

Used