SPIRE Technical Solutions


Spacer, Rear Step	Bracket, Shipping Cldwn Wafer	Cap 6" buffer robot
Part Number: 0020-21214	Part Number: 0020-21194	Part Number: 0020-21113


Clamp 8 inch buffer frog leg	Cap 8 inch buffer frog leg	BRACKET CLAMP, 1.5-2.5" THICK WALL
Part Number: 0020-21105	Part Number: 0020-21104-C	Part Number: 0020-21098


Cover, chamber A/B interconnect BD	Cover, chamber interconnect BD	Slip–hinge, female, rear step
Part Number: 0020-21091	Part Number: 0020-21089	Part Number: 0020-21070


Slip–hinge, male, rear step	Bracket, Rear Step, Right	Housing lamp HTR power
Part Number: 0020-21069	Part Number: 0020-21068	Part Number: 0020-21045

Used