SPIRE Technical Solutions


Base CD/PT 150mm	Spacer, Rear Step	Bracket, Shipping Cldwn Wafer
Part Number: 0020-21219	Part Number: 0020-21214	Part Number: 0020-21194


Cap 6" buffer robot	Clamp 8 inch buffer frog leg	Cap 8 inch buffer frog leg
Part Number: 0020-21113	Part Number: 0020-21105	Part Number: 0020-21104-C


BRACKET CLAMP, 1.5-2.5" THICK WALL	Cover, chamber A/B interconnect BD	Cover, chamber interconnect BD
Part Number: 0020-21098	Part Number: 0020-21091	Part Number: 0020-21089


Slip–hinge, female, rear step	Slip–hinge, male, rear step	Bracket, Rear Step, Right
Part Number: 0020-21070	Part Number: 0020-21069	Part Number: 0020-21068

Used