SPIRE Technical Solutions


Plate contact DC source 13" left	Plate contact DC source 13" R	RGA BLANK OFF
Part Number: 0020-21485	Part Number: 0020-21482	Part Number: 0020-21436


Insulator, RF connector DC bia	Flat cover, chamber interconnect	Cover lift A/B
Part Number: 0020-21404-U	Part Number: 0020-21266	Part Number: 0020-21265


Wafer orienter shaft guide	Turbo support shelf	Hoop CD/PT 150mm
Part Number: 0020-21261	Part Number: 0020-21251	Part Number: 0020-21222


Base CD/PT 150mm	Spacer, Rear Step	Bracket, Shipping Cldwn Wafer
Part Number: 0020-21219	Part Number: 0020-21214	Part Number: 0020-21194

Used