SPIRE Technical Solutions


Plate contact, DC source 11.3" right	Plate contact DC source 11.3" left	Plate contact DC source 13" left
Part Number: 0020-21488	Part Number: 0020-21486	Part Number: 0020-21485


Plate contact DC source 13" R	RGA BLANK OFF	Insulator, RF connector DC bia
Part Number: 0020-21482	Part Number: 0020-21436	Part Number: 0020-21404-U


Flat cover, chamber interconnect	Cover lift A/B	Wafer orienter shaft guide
Part Number: 0020-21266	Part Number: 0020-21265	Part Number: 0020-21261


Turbo support shelf	Hoop CD/PT 150mm	Base CD/PT 150mm
Part Number: 0020-21251	Part Number: 0020-21222	Part Number: 0020-21219

Used