SPIRE Technical Solutions


Shim, rotary feed thru .6 thick	DC ACTUATOR SOURCE	Flange, Blankoff Rotation
Part Number: 0020-21863	Part Number: 0020-21853-U	Part Number: 0020-21780


Flange, Blankoff CCD	PLUG, CVD/MONOLITH INTERFACE	Collimator spacer pillow block
Part Number: 0020-21779	Part Number: 0020-21716	Part Number: 0020-21713-U


8" Orienter Chuck	8" Orienter Lifter	Chuck Orienter 6"
Part Number: 0020-21708	Part Number: 0020-21707	Part Number: 0020-21706


Lifter 6"	ARM, Lifter, Degas/ orienter	Loadlock shield bracket
Part Number: 0020-21705	Part Number: 0020-21675	Part Number: 0020-21674

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