SPIRE Technical Solutions


Hoop CD/PT 150mm	Base CD/PT 150mm	Spacer, Rear Step
Part Number: 0020-21222	Part Number: 0020-21219	Part Number: 0020-21214


Bracket, Shipping Cldwn Wafer	Cap 6" buffer robot	Clamp 8 inch buffer frog leg
Part Number: 0020-21194	Part Number: 0020-21113	Part Number: 0020-21105


Cap 8 inch buffer frog leg	BRACKET CLAMP, 1.5-2.5" THICK WALL	Cover, chamber A/B interconnect BD
Part Number: 0020-21104-C	Part Number: 0020-21098	Part Number: 0020-21091


Cover, chamber interconnect BD	Slip–hinge, female, rear step	Slip–hinge, male, rear step
Part Number: 0020-21089	Part Number: 0020-21070	Part Number: 0020-21069

Used