| Collimator spacer pillow block | 8" Orienter Chuck | 8" Orienter Lifter |
|
Part Number: 0020-21713-U
|
Part Number: 0020-21708
|
Part Number: 0020-21707
|
| Chuck Orienter 6" | Lifter 6" | ARM, Lifter, Degas/ orienter |
|
Part Number: 0020-21706
|
Part Number: 0020-21705
|
Part Number: 0020-21675
|
| Loadlock shield bracket | Insulator Source 13" | Plate contact, DC source 11.3" right |
|
Part Number: 0020-21674
|
Part Number: 0020-21664-U
|
Part Number: 0020-21488
|
| Plate contact DC source 11.3" left | Plate contact DC source 13" left | Plate contact DC source 13" R |
|
Part Number: 0020-21486
|
Part Number: 0020-21485
|
Part Number: 0020-21482
|











