SPIRE Technical Solutions


Flange, Blankoff CCD	PLUG, CVD/MONOLITH INTERFACE	Collimator spacer pillow block
Part Number: 0020-21779	Part Number: 0020-21716	Part Number: 0020-21713-U


8" Orienter Chuck	8" Orienter Lifter	Chuck Orienter 6"
Part Number: 0020-21708	Part Number: 0020-21707	Part Number: 0020-21706


Lifter 6"	ARM, Lifter, Degas/ orienter	Loadlock shield bracket
Part Number: 0020-21705	Part Number: 0020-21675	Part Number: 0020-21674


Insulator Source 13"	Plate contact, DC source 11.3" right	Plate contact DC source 11.3" left
Part Number: 0020-21664-U	Part Number: 0020-21488	Part Number: 0020-21486

Used