SPIRE Technical Solutions


PLUG, CVD/MONOLITH INTERFACE	Collimator spacer pillow block	8" Orienter Chuck
Part Number: 0020-21716	Part Number: 0020-21713-U	Part Number: 0020-21708


8" Orienter Lifter	Chuck Orienter 6"	Lifter 6"
Part Number: 0020-21707	Part Number: 0020-21706	Part Number: 0020-21705


ARM, Lifter, Degas/ orienter	Loadlock shield bracket	Insulator Source 13"
Part Number: 0020-21675	Part Number: 0020-21674	Part Number: 0020-21664-U


Plate contact, DC source 11.3" right	Plate contact DC source 11.3" left	Plate contact DC source 13" left
Part Number: 0020-21488	Part Number: 0020-21486	Part Number: 0020-21485

Used