SPIRE Technical Solutions


ARM, Lifter, Degas/ orienter	Loadlock shield bracket	Insulator Source 13"
Part Number: 0020-21675	Part Number: 0020-21674	Part Number: 0020-21664-U


Plate contact, DC source 11.3" right	Plate contact DC source 11.3" left	Plate contact DC source 13" left
Part Number: 0020-21488	Part Number: 0020-21486	Part Number: 0020-21485


Plate contact DC source 13" R	RGA BLANK OFF	Flat cover, chamber interconnect
Part Number: 0020-21482	Part Number: 0020-21436	Part Number: 0020-21266


Cover lift A/B	Wafer orienter shaft guide	Turbo support shelf
Part Number: 0020-21265	Part Number: 0020-21261	Part Number: 0020-21251

Used