| Cam, Right Outboard | Plate cover coherent 8 | Bracket pillow block |
|
Part Number: 0020-23032
|
Part Number: 0020-22993
|
Part Number: 0020-22983
|
| ADAPTER TIN 8” WAFER CHAMBER 16” | Plate contact DC, left TiN 8" wafer | Plate contact DC right TiN 8" wafer |
|
Part Number: 0020-22982
|
Part Number: 0020-22980
|
Part Number: 0020-22979
|
| Insulator TiN 8" Wafer | Adapter, collimator source 13" | shutter enclosure |
|
Part Number: 0020-22975
|
Part Number: 0020-22950
|
Part Number: 0020-22879
|
| Bell jar adapter | Pin, PCII lift | Preclean Lift Hoop |
|
Part Number: 0020-22848
|
Part Number: 0020-22839
|
Part Number: 0020-22838
|












