SPIRE Technical Solutions


Clamp Blade Ext Wrist	Clamp Blade Ext Wrist	VHP driver bracket
Part Number: 0020-75889-C	Part Number: 0020-75889	Part Number: 0020-75865


LID, TRANSFER CHAMBER VHP ROBOT, OTF	Water manifold 3 metal blade HDP-CVD	Water manifold 3 PTFE HDP-CVD
Part Number: 0020-75851	Part Number: 0020-75735	Part Number: 0020-75731


Laser Bushing Plug	Chamber Cover, Top	Wafer C lexan viewport
Part Number: 0020-75360	Part Number: 0020-75140	Part Number: 0020-75093


CHE,F COVER	Bracket, common connector	Chamber interconnect cover WB
Part Number: 0020-70823	Part Number: 0020-70822	Part Number: 0020-70821

Used