| Line Lift purge in chamber A/B | Weldment, 8" Hoop, PVD W/B Chamber | Cover, EXT EMO FI |
|
Part Number: 0050-06431
|
Part Number: 0041-30416
|
Part Number: 0040-96887-C
|
| Blank–off position E, 200mm en | Slit valve door, Ni Plated SST | Bracket, water flow |
|
Part Number: 0040-87211
|
Part Number: 0040-86928
|
Part Number: 0040-86545
|
| ULTIMA TE LOWER COVER | Cover Assy, Top RPS | Arm, Weldment Source PVD HTHU |
|
Part Number: 0040-85939
|
Part Number: 0040-85938-U
|
Part Number: 0040-76554
|
| Cryo elbow without viewport | Source Arm Weldment | Arm, source weldment, standard body |
|
Part Number: 0040-76272
|
Part Number: 0040-76073
|
Part Number: 0040-76072
|












