SPIRE Technical Solutions


Chamber interconnect cover WB	Bracket, common connector	CHE,F COVER
Part Number: 0020-70821	Part Number: 0020-70822	Part Number: 0020-70823


Wafer C lexan viewport	Chamber Cover, Top	Laser Bushing Plug
Part Number: 0020-75093	Part Number: 0020-75140	Part Number: 0020-75360


Water manifold 3 PTFE HDP-CVD	Water manifold 3 metal blade HDP-CVD	LID, TRANSFER CHAMBER VHP ROBOT, OTF
Part Number: 0020-75731	Part Number: 0020-75735	Part Number: 0020-75851


VHP driver bracket	Clamp Blade Ext Wrist	Clamp Blade Ext Wrist
Part Number: 0020-75865	Part Number: 0020-75889	Part Number: 0020-75889-C

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