| Bell jar adapter | shutter enclosure | Adapter, collimator source 13" |
|
Part Number: 0020-22848
|
Part Number: 0020-22879
|
Part Number: 0020-22950
|
| Insulator TiN 8" Wafer | Plate contact DC right TiN 8" wafer | Plate contact DC, left TiN 8" wafer |
|
Part Number: 0020-22975
|
Part Number: 0020-22979
|
Part Number: 0020-22980
|
| ADAPTER TIN 8” WAFER CHAMBER 16” | Bracket pillow block | Plate cover coherent 8 |
|
Part Number: 0020-22982
|
Part Number: 0020-22983
|
Part Number: 0020-22993
|
| Cam, Right Outboard | Cam, Left Outboard | ADAPTER SOURCE 13" |
|
Part Number: 0020-23032
|
Part Number: 0020-23036
|
Part Number: 0020-23042
|












