SPIRE Technical Solutions


Preclean Lift Hoop	Pin, PCII lift	Bell jar adapter
Part Number: 0020-22838	Part Number: 0020-22839	Part Number: 0020-22848


shutter enclosure	Adapter, collimator source 13"	Insulator TiN 8" Wafer
Part Number: 0020-22879	Part Number: 0020-22950	Part Number: 0020-22975


Plate contact DC right TiN 8" wafer	Plate contact DC, left TiN 8" wafer	ADAPTER TIN 8” WAFER CHAMBER 16”
Part Number: 0020-22979	Part Number: 0020-22980	Part Number: 0020-22982


Bracket pillow block	Plate cover coherent 8	Cam, Right Outboard
Part Number: 0020-22983	Part Number: 0020-22993	Part Number: 0020-23032

Used