SPIRE Technical Solutions


Plate contact DC source 11.3" left	Plate contact, DC source 11.3" right	Insulator Source 13"
Part Number: 0020-21486	Part Number: 0020-21488	Part Number: 0020-21664-U


Loadlock shield bracket	ARM, Lifter, Degas/ orienter	Lifter 6"
Part Number: 0020-21674	Part Number: 0020-21675	Part Number: 0020-21705


Chuck Orienter 6"	8" Orienter Lifter	8" Orienter Chuck
Part Number: 0020-21706	Part Number: 0020-21707	Part Number: 0020-21708


Collimator spacer pillow block	PLUG, CVD/MONOLITH INTERFACE	Flange, Blankoff CCD
Part Number: 0020-21713-U	Part Number: 0020-21716	Part Number: 0020-21779

Used