SPIRE Technical Solutions


Plate contact DC source 13" left	Plate contact DC source 11.3" left	Plate contact, DC source 11.3" right
Part Number: 0020-21485	Part Number: 0020-21486	Part Number: 0020-21488


Insulator Source 13"	Loadlock shield bracket	ARM, Lifter, Degas/ orienter
Part Number: 0020-21664-U	Part Number: 0020-21674	Part Number: 0020-21675


Lifter 6"	Chuck Orienter 6"	8" Orienter Lifter
Part Number: 0020-21705	Part Number: 0020-21706	Part Number: 0020-21707


8" Orienter Chuck	Collimator spacer pillow block	PLUG, CVD/MONOLITH INTERFACE
Part Number: 0020-21708	Part Number: 0020-21713-U	Part Number: 0020-21716

Used