SPIRE Technical Solutions


Bracket, Shipping Cldwn Wafer	Spacer, Rear Step	Base CD/PT 150mm
Part Number: 0020-21194	Part Number: 0020-21214	Part Number: 0020-21219


Hoop CD/PT 150mm	Turbo support shelf	Wafer orienter shaft guide
Part Number: 0020-21222	Part Number: 0020-21251	Part Number: 0020-21261


Cover lift A/B	Flat cover, chamber interconnect	Insulator, RF connector DC bia
Part Number: 0020-21265	Part Number: 0020-21266	Part Number: 0020-21404-U


RGA BLANK OFF	Plate contact DC source 13" R	Plate contact DC source 13" left
Part Number: 0020-21436	Part Number: 0020-21482	Part Number: 0020-21485

Used