SPIRE Technical Solutions


Clamp 8 inch buffer frog leg	Cap 6" buffer robot	Bracket, Shipping Cldwn Wafer
Part Number: 0020-21105	Part Number: 0020-21113	Part Number: 0020-21194


Spacer, Rear Step	Base CD/PT 150mm	Hoop CD/PT 150mm
Part Number: 0020-21214	Part Number: 0020-21219	Part Number: 0020-21222


Turbo support shelf	Wafer orienter shaft guide	Cover lift A/B
Part Number: 0020-21251	Part Number: 0020-21261	Part Number: 0020-21265


Flat cover, chamber interconnect	RGA BLANK OFF	Plate contact DC source 13" R
Part Number: 0020-21266	Part Number: 0020-21436	Part Number: 0020-21482

Used