Arm source weldment Standard chamber | Kit 6” JMF Xfer blade Listing. | Xfer robot assy |
Part Number: 0040-20006
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Part Number: 0240-70141
|
Part Number: 0010-20030
|
Mounting block slit valve | Slow pump W/PPLE | Base CD/PT 150mm |
Part Number: 0020-20345
|
Part Number: 0040-20125
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Part Number: 0020-21219
|
Hoop CD/PT 150mm | Pedestal CD/PT Wafer 150mm | Manifold pedestal cool down 6 inch |
Part Number: 0020-21222
|
Part Number: 0020-22799
|
Part Number: 0050-20004
|
Assy 6” Buffer Blade Wrist, HP+ | cover, transfer chamber lid | Wafer orienter shaft guide |
Part Number: 0010-75540
|
Part Number: 0040-48246
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Part Number: 0020-21261
|