SPIRE Technical Solutions


Spacer, pheumatic valve, BPSG, RTP	Spacer, bracket, shut–off valve	Bracket, shut–off valve, outlet
Part Number: 0021-03290	Part Number: 0020-70720	Part Number: 0020-70719


Bracket, shut–off valve, inlet	Cover, rotation, left, RTP chamber	Cover, rotation, rear, RTP chamber
Part Number: 0020-70718	Part Number: 0020-39409	Part Number: 0020-39407


Cap, lamp feedthru	View port, HDP–CVD Non-Anodized Alum	Hardstop, buffer/ transfer lid hoist
Part Number: 0020-20523-N	Part Number: 0020-18303	Part Number: 0020-17523


Bushing Guide	8" Chuck, TC	Shaft, Lifter TC
Part Number: 0020-29077	Part Number: 0020-22414	Part Number: 0020-22363

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