SPIRE Technical Solutions


Insulator, TIN, 8" Wafer	Pedestal shield 8” preclean	PANEL PCB MOUNTING N2 HEATER
Part Number: 0020-22975-N	Part Number: 0020-22844	Part Number: 0020-22711


ADAPTER 11.3" SOURCE WIDE BODY CHAMBER	8" Chuck, TC	8" Hoop with TC
Part Number: 0020-22547 N	Part Number: 0020-22414	Part Number: 0020-22387


Plate, TC box	Collimator spacer pillow block	Chuck 8" - New
Part Number: 0020-22361	Part Number: 0020-21713-N	Part Number: 0020-21708-N


Insulator Source, 13"	Brace, front skin	Bracket, Bottom
Part Number: 0020-21664	Part Number: 0020-21444	Part Number: 0020-21002

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