SPIRE Technical Solutions


Disk, HUB, heater NEW	Insulator, TIN, 8" Wafer	Pedestal shield 8” preclean
Part Number: 0020-23352-N	Part Number: 0020-22975-N	Part Number: 0020-22844


PANEL PCB MOUNTING N2 HEATER	ADAPTER 11.3" SOURCE WIDE BODY CHAMBER	8" Chuck, TC
Part Number: 0020-22711	Part Number: 0020-22547 N	Part Number: 0020-22414


8" Hoop with TC	Plate, TC box	Collimator spacer pillow block
Part Number: 0020-22387	Part Number: 0020-22361	Part Number: 0020-21713-N


Chuck 8" - New	Insulator Source, 13"	Brace, front skin
Part Number: 0020-21708-N	Part Number: 0020-21664	Part Number: 0020-21444

New