SPIRE Technical Solutions


BLADE 8 INCH, BUFFER FROG LEG	MANIFOLD,WATER SUPPLY AMAT 0	MANIFOLD, WATER RETURN AMAT 0
Part Number: 0020-70285-S	Part Number: 0020-70191	Part Number: 0020-70190


Thermal Gasket Heater Block	HANDLE, OFF-SET PULL	PLATE, PUMPING, 8" SR, WXZ
Part Number: 0020-53525	Part Number: 0020-46639	Part Number: 0020-42079


Bracket, wafer detector	PLUG, HOLE	Cover, rotation, left, RTP chamber
Part Number: 0020-40711	Part Number: 0020-40164	Part Number: 0020-39409


Cover, rotation, rear, RTP chamber	COVER, LEFT SIDE EXHAUST BOX, 5200 CENTURA	OutRGGR, front panel, RTP NEW
Part Number: 0020-39407	Part Number: 0020-39397	Part Number: 0020-39278-N

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