SPIRE Technical Solutions


PLATE, PUMPING, 8" SR, WXZ	Bracket, wafer detector	PLUG, HOLE
Part Number: 0020-42079	Part Number: 0020-40711	Part Number: 0020-40164


Cover, rotation, left, RTP chamber	Cover, rotation, rear, RTP chamber	COVER, LEFT SIDE EXHAUST BOX, 5200 CENTURA
Part Number: 0020-39409	Part Number: 0020-39407	Part Number: 0020-39397


OutRGGR, front panel, RTP NEW	CLAMP, WELDMENT, 03-OUT, CENTUR 5200G0221-	Clamp, .25 OD Gasline, RP
Part Number: 0020-39278-N	Part Number: 0020-39033	Part Number: 0020-38647


Clamp, Lamp Housing, ATM RTP	CLAMP, TOP WF6/SIH4	Housing tilt spring lamp
Part Number: 0020-38104	Part Number: 0020-37563	Part Number: 0020-37464

New