SPIRE Technical Solutions


Bracket, wafer detector	PLUG, HOLE	Cover, rotation, left, RTP chamber
Part Number: 0020-40711	Part Number: 0020-40164	Part Number: 0020-39409


Cover, rotation, rear, RTP chamber	COVER, LEFT SIDE EXHAUST BOX, 5200 CENTURA	OutRGGR, front panel, RTP NEW
Part Number: 0020-39407	Part Number: 0020-39397	Part Number: 0020-39278-N


CLAMP, WELDMENT, 03-OUT, CENTUR 5200G0221-	Clamp, .25 OD Gasline, RP	Clamp, Lamp Housing, ATM RTP
Part Number: 0020-39033	Part Number: 0020-38647	Part Number: 0020-38104


CLAMP, TOP WF6/SIH4	Housing tilt spring lamp	Gear, Spur Driven, R3 Rotation
Part Number: 0020-37563	Part Number: 0020-37464	Part Number: 0020-36393

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