SPIRE Technical Solutions


Thermal Gasket Heater Block	PLATE, PUMPING, 8" SR, WXZ	Bracket, wafer detector
Part Number: 0020-53525	Part Number: 0020-42079	Part Number: 0020-40711


PLUG, HOLE	Cover, rotation, left, RTP chamber	Cover, rotation, rear, RTP chamber
Part Number: 0020-40164	Part Number: 0020-39409	Part Number: 0020-39407


COVER, LEFT SIDE EXHAUST BOX, 5200 CENTURA	OutRGGR, front panel, RTP NEW	CLAMP, WELDMENT, 03-OUT, CENTUR 5200G0221-
Part Number: 0020-39397	Part Number: 0020-39278-N	Part Number: 0020-39033


Clamp, .25 OD Gasline, RP	Clamp, Lamp Housing, ATM RTP	CLAMP, TOP WF6/SIH4
Part Number: 0020-38647	Part Number: 0020-38104	Part Number: 0020-37563

New