SPIRE Technical Solutions


Panel manifold rear water RF generator	Guard shutter blade	Spacer plate, TC amp, B101 hea
Part Number: 0040-22415	Part Number: 0040-22438	Part Number: 0040-22489


Hub spacer B101 heater	Cover, RF enclosure cable inte	Adjustment ceramic skirt
Part Number: 0040-22802	Part Number: 0040-22812	Part Number: 0040-24114


WELDMENT, SLIT VALVE INSERT,PROC. CHAMBER	Extension, Side Metrology EMO,	Gimbal Assy, Orienter Lifter
Part Number: 0040-35057	Part Number: 0040-38135	Part Number: 0040-39554-N


Gimbal Assy, Orienter lifter assy	LIFT PLATE	Holder, Laser Diode - New
Part Number: 0040-39554-N-OEM	Part Number: 0040-39566	Part Number: 0040-45770-N

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