SPIRE Technical Solutions


Gas Post Lever	Brkt Connector Mtrzd Lift	Bracket, Motor, Rotation, Orienter, Wafer
Part Number: 0020-70717	Part Number: 0020-70554-N	Part Number: 0020-70343


MANIFOLD,WATER SUPPLY AMAT 0	MANIFOLD, WATER RETURN AMAT 0	Thermal Gasket Heater Block
Part Number: 0020-70191	Part Number: 0020-70190	Part Number: 0020-53525


PLATE, PUMPING, 8" SR, WXZ	Bracket, wafer detector	PLUG, HOLE
Part Number: 0020-42079	Part Number: 0020-40711	Part Number: 0020-40164


Cover, rotation, left, RTP chamber	Cover, rotation, rear, RTP chamber	COVER, LEFT SIDE EXHAUST BOX, 5200 CENTURA
Part Number: 0020-39409	Part Number: 0020-39407	Part Number: 0020-39397

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