SPIRE Technical Solutions


HARNESS ASSY, CH E	HARNESS ASSY, CH E DIGITAL	Harness Assy, CH INTCN jumper,
Part Number: 0140-20512	Part Number: 0140-20513	Part Number: 0140-21726


Harness Assy, CVD/Tungsten Chamber	Harness Assy, DC PWR Mother BD - Disk PWR	Harness Assy, Door INTLK SWTCH
Part Number: 0140-09223	Part Number: 0140-20035	Part Number: 0140-76316


Harness Assy, Dual 5 phase driver	Harness ASSY, Ebara monolith pump	Harness Assy, EMO Satelite Box
Part Number: 0140-76622	Part Number: 0140-20283	Part Number: 0140-70192


Harness Assy, Exhaust INTLK	Harness ASSY, H2 sensor interlock, CVD	Harness ASSY, H2O flow CH1–4
Part Number: 0140-00961	Part Number: 0140-21313	Part Number: 0140-21528

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