SPIRE Technical Solutions


Shield Inner, AL ARC-SPRAY 8”	Shield Lower, AL ARC-SPRAY 8”	Shield, Upper, Grounded, AL AR
Part Number: 0020-08673	Part Number: 0020-08674	Part Number: 0020-08677


Clamp, HDP-CVD Ultima 1.5	SUPPORT HINGE LAMP MODULE	GUIDE-NUT, LIMIT SWITCH
Part Number: 0020-08759	Part Number: 0020-09135	Part Number: 0020-09413


BRACKET HANDLE W/3370-01017 HANDLE	Cover, Throttle Drive	TOP COVER FRONT LEFT/RIGHT SIDE
Part Number: 0020-09680	Part Number: 0020-10004	Part Number: 0020-10107


PUMPING PLATE 4,5,6" SILANE/NITRIDE	Cooling Plate	Backplate, Double Sealing Rings, Lamp Module
Part Number: 0020-10752	Part Number: 0020-10767	Part Number: 0020-10768

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