SPIRE Technical Solutions


Assy, Left Pivot HP+/VHP+	Orienter hinge lid with laser	Assy, 8" Enhanced Degas Lamp, 350C
Part Number: 0010-02170	Part Number: 0010-02141	Part Number: 0010-02124


PVD SLIT VALVE DOOR AND MOUNT	6" SMF/JMF MCA E-Chuck, NI Plated	Skirt level adjustment
Part Number: 0010-02056	Part Number: 0010-01456	Part Number: 0010-01245


ASSY, Source Locking Pin	Bakeout Lamp Clamp Assembly	Assy, TC AMP & Overtemp INTLK, DXZ
Part Number: 0010-01100-U	Part Number: 0010-00865	Part Number: 0090-39174


LASED, PEDESTAL, 200MM, JMF DPS
Part Number: 0040-60593

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