SPIRE Technical Solutions


Toxic System Gas Interlocks Retrofit Kit	Kit, MC Robot Drive Assy, P5000	Tool Zero Position, Dual Blade Robot w/Handle
Part Number: 0242-35956	Part Number: 0242-75991	Part Number: 0270-00258


Tool, 8" orientor lift hoop calibration	HM POS tool 8” heater-to-robot HTESC	200mm Endura Front Panel Label Template
Part Number: 0270-01150	Part Number: 0270-02271	Part Number: 0270-03451


COLLAR,150MM,ULTIMA HDP-CVD	Tool Calibration Orienter 6"	Tool Calibration Orienter 8"
Part Number: 0270-18074	Part Number: 0270-20043	Part Number: 0270-20044


SOURCE ADAPTER STAND, STANDARD	Jig 8in PVD Heater to Lift Alignment	JIG 8" PVD HEATER TO LIFT ALIGNMENT
Part Number: 0270-20048	Part Number: 0270-20056-U	Part Number: 0270-20059

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