| Spec Cntl Dwg, Intelligent Motor Controller | EMO switch assy | PCB video controller VGA |
|
Part Number: 0190-76005
|
Part Number: 0190-76024
|
Part Number: 0190-76050
|
| Insulator 200mm WB | Pin, lift, heater, WXZ | LIFT PIN, DELTA MF NITRIDE XP, 200MM |
|
Part Number: 0200-09129
|
Part Number: 0200-09716
|
Part Number: 0200-10074
|
| SHIELD COMMON SILANE, 200MM | Pin, lift, heater, DXZ | Ceramic, Isolator Cap |
|
Part Number: 0200-10191
|
Part Number: 0200-10284
|
Part Number: 0200-10486-U
|
| Top Insulator Plate | Insulator, Non-Pwr-Side, Alumina, DPA | Cover, Low Profile, HDPCVD |
|
Part Number: 0200-10491-U
|
Part Number: 0200-10522-U
|
Part Number: 0200-18081
|










