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TC assy heater WXZ
ETO, RF GEN CONTROL BOARD
RING, WAFER LIFT, REV 1 CERAMIC, 200MM
TC assy heater WXZ ETO, RF GEN CONTROL BOARD RING, WAFER LIFT, REV 1 CERAMIC, 200MM
Part Number: 0190-01403
Part Number: 0190-02977
Part Number: 0190-09291
 
Assy, Side Door, DPA
Assy, Cathode, DPA
Lamp Bakeout with Lugs
Assy, Side Door, DPA Assy, Cathode, DPA Lamp Bakeout with Lugs
Part Number: 0190-09746
Part Number: 0190-09774-U
Part Number: 0190-13035-U
 
Chassis, HTESC Hi-Voltage
Cable, 50ft umbilical, HTESC
GFCI-1 shunt trip assy/harness
Chassis, HTESC Hi-Voltage Cable, 50ft umbilical, HTESC GFCI-1 shunt trip assy/harness
Part Number: 0190-13067
Part Number: 0190-13324-U
Part Number: 0190-17841
 
RF Cable ETO Bias Ultima HDP-CVD
ETO HV Cap Bank
DELATECH CDO SOFTWARE INTERLOCK HARNESS
RF Cable ETO Bias Ultima HDP-CVD ETO HV Cap Bank DELATECH CDO SOFTWARE INTERLOCK HARNESS
Part Number: 0190-18122
Part Number: 0190-18136
Part Number: 0190-18289