SPIRE Technical Solutions


Harness Assy, Preclean II Chamb/Match Int	Harness ASSY PCII CHBR match interlock	Harness Assy Ext PCII w/Cryo-Mod
Part Number: 0140-20701	Part Number: 0140-20710	Part Number: 0140-20730


Harness ASSY source cover PVD	Harness ASSY, H2 sensor interlock, CVD	HARNESS ASSY, LINE OVERTEMP, C
Part Number: 0140-20741-U	Part Number: 0140-21313	Part Number: 0140-21314


Harness ASSY high-efficiency match	Harness ASSY, H2O flow CH1–4	Harness Assy, CH INTCN jumper,
Part Number: 0140-21406	Part Number: 0140-21528	Part Number: 0140-21726


Harness Assy, Mainframe EXH	Harness ASSY Wide Body Chamber	Harness Assy, WB Chamber POS 3
Part Number: 0140-35760	Part Number: 0140-70151	Part Number: 0140-70152

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