SPIRE Technical Solutions


Harness ASSY chamber 3 and 4 I/C	Harness assy DC PWR 2nd set disk drive	Harness Assy, Storage CH Lift/Cover
Part Number: 0140-20541	Part Number: 0140-20656	Part Number: 0140-20688


Harness ASSY, preclean 2 CHBR/RF covers	Harness Assy, Preclean II Chamb/Match Int	Harness ASSY PCII CHBR match interlock
Part Number: 0140-20699	Part Number: 0140-20701	Part Number: 0140-20710


Harness Assy Ext PCII w/Cryo-Mod	Harness ASSY source cover PVD	Harness ASSY, H2 sensor interlock, CVD
Part Number: 0140-20730	Part Number: 0140-20741-U	Part Number: 0140-21313


HARNESS ASSY, LINE OVERTEMP, C	Harness ASSY high-efficiency match	Harness ASSY, H2O flow CH1–4
Part Number: 0140-21314	Part Number: 0140-21406	Part Number: 0140-21528

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