SPIRE Technical Solutions


PCB ASSY,CONT power DIST	DI/O Dist PCB	Chamber interconnect PCB
Part Number: 0100-20164	Part Number: 0100-20217	Part Number: 0100-20313


SBC I/O Controller Distribution WPS BD.	PCBA Centerfinder interface	Elect Assy, enhanced wafer orienter
Part Number: 0100-70019	Part Number: 0100-76055	Part Number: 0100-76058


PCB Assy, wafer orienter	Harness Assy, LTESC WB Endura POS 3 & C	Harness Assy, Skins INTLK SW,
Part Number: 0100-76128	Part Number: 0140-00475	Part Number: 0140-00760


Harness Assy, Exhaust INTLK	Hrns Assy Intrconn PVD Cmbr WB Chmbr	Harness ASSY interconnect
Part Number: 0140-00961	Part Number: 0140-01927	Part Number: 0140-02009

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