SPIRE Technical Solutions


Chamber interconnect PCB	SBC I/O Controller Distribution WPS BD.	PCBA Centerfinder interface
Part Number: 0100-20313	Part Number: 0100-70019	Part Number: 0100-76055


Elect Assy, enhanced wafer orienter	PCB Assy, wafer orienter	Harness Assy, LTESC WB Endura POS 3 & C
Part Number: 0100-76058	Part Number: 0100-76128	Part Number: 0140-00475


Harness Assy, Skins INTLK SW,	Harness Assy, Exhaust INTLK	Hrns Assy Intrconn PVD Cmbr WB Chmbr
Part Number: 0140-00760	Part Number: 0140-00961	Part Number: 0140-01927


Harness ASSY interconnect	Hrns Assy MF Interconnect	Harness Assy, IGL/ISSG Intfc
Part Number: 0140-02009	Part Number: 0140-04267	Part Number: 0140-07777-U

Used