SPIRE Technical Solutions


Chamber Interconnect PCB	PCB Assy, Cryo Temp Interconnect	PCB ASSY, system stepper distr
Part Number: 0100-20004--2370-C	Part Number: 0100-20008	Part Number: 0100-20009


PCB ASSY, STEPPER DRIVER DISTRIBUTION	Interlock Select Bd.	PNEUMATIC SLIT VLV INT PCB
Part Number: 0100-20026	Part Number: 0100-20037	Part Number: 0100-20042


Heat Exchanger Dist. Bd	PCB Assy, TC Gauge	PCB Assy, Laser Driver
Part Number: 0100-20049	Part Number: 0100-20063	Part Number: 0100-20078


PCB Assy, Water Leak Detector	PCB Assy, Analog Input/Output	System expansion board w/bracket
Part Number: 0100-20097	Part Number: 0100-20100	Part Number: 0100-20152

Used