SPIRE Technical Solutions


wPCB ASSY, chamber interconnect	Chamber Interconnect PCB	Chamber Interconnect PCB
Part Number: 0100-20004	Part Number: 0100-20004--2350-026-C	Part Number: 0100-20004--2370-C


PCB Assy, Cryo Temp Interconnect	PCB ASSY, system stepper distr	PCB ASSY, STEPPER DRIVER DISTRIBUTION
Part Number: 0100-20008	Part Number: 0100-20009	Part Number: 0100-20026


Interlock Select Bd.	PNEUMATIC SLIT VLV INT PCB	Heat Exchanger Dist. Bd
Part Number: 0100-20037	Part Number: 0100-20042	Part Number: 0100-20049


PCB Assy, TC Gauge	PCB Assy, Laser Driver	PCB Assy, Water Leak Detector
Part Number: 0100-20063	Part Number: 0100-20078	Part Number: 0100-20097

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