SPIRE Technical Solutions


Analog input board	PCB ASSY CHAMBER INTERCONNECT BD	Wafer sensor pcb
Part Number: 0100-09054	Part Number: 0100-09099	Part Number: 0100-09123


PCB ASSY, 2 PH STEP M DRIVER INTF BD.	OMS Stepper Interface.	LI/APC Matrix BD
Part Number: 0100-09245	Part Number: 0100-09291	Part Number: 0100-09293


Analog input board	TC AMP Intlk BD DxZ	PCB Assy Digital I/O BD
Part Number: 0100-11000	Part Number: 0100-18058	Part Number: 0100-20003


wPCB ASSY, chamber interconnect	Chamber Interconnect PCB	Chamber Interconnect PCB
Part Number: 0100-20004	Part Number: 0100-20004--2350-026-C	Part Number: 0100-20004--2370-C

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