SPIRE Technical Solutions


Wafer sensor pcb	PCB ASSY, 2 PH STEP M DRIVER INTF BD.	OMS Stepper Interface.
Part Number: 0100-09123	Part Number: 0100-09245	Part Number: 0100-09291


LI/APC Matrix BD	Analog input board	TC AMP Intlk BD DxZ
Part Number: 0100-09293	Part Number: 0100-11000	Part Number: 0100-18058


PCB Assy Digital I/O BD	wPCB ASSY, chamber interconnect	Chamber Interconnect PCB
Part Number: 0100-20003	Part Number: 0100-20004	Part Number: 0100-20004--2350-026-C


Chamber Interconnect PCB	PCB Assy, Cryo Temp Interconnect	PCB ASSY, system stepper distr
Part Number: 0100-20004--2370-C	Part Number: 0100-20008	Part Number: 0100-20009

Used