SPIRE Technical Solutions


Assembly, Reactor, DPA	EMO Assembly	ASSY BLOW OUT VALVE
Part Number: 0090-36276-U	Part Number: 0090-36390	Part Number: 0090-70014


ASSY, PNEU EV, 4 way double (for slit valve)	PCBA ASSY,SBC SYNERGY 68040 controller	Wafer orienter board
Part Number: 0090-70015	Part Number: 0090-75015	Part Number: 0090-76058


ASSY, ELCTRCL, SBC SYNERGY	VME stepper controller PCB	VME stepper controller PCB
Part Number: 0090-76109	Part Number: 0100-00003	Part Number: 0100-00003-T


Monitor/KB/Serial/Light Pen In	SMIF PCB	PCB Assy, Laser Driver II
Part Number: 0100-00400	Part Number: 0100-00639	Part Number: 0100-01098

Used