SPIRE Technical Solutions


Cover, EXT EMO FI	Weldment, 8" Hoop, PVD W/B Chamber	Line Lift purge in chamber A/B
Part Number: 0040-96887-C	Part Number: 0041-30416	Part Number: 0050-06431


Line Reducer ¼-1/2 3300-0214	TUBE WELDMENT CAP MAN	Turbo Purge Tube Weldment
Part Number: 0050-07294	Part Number: 0050-09057	Part Number: 0050-09058


FTG Pipe Flg NW40 x NW40 11"	Manometer Weldment	Manifold pedestal cool down 6 inch
Part Number: 0050-09217	Part Number: 0050-10146	Part Number: 0050-20004


GAS LINE CHAMBER 1 (HEATER) MF	GAS LINE CHAMBER 1 (HEATER) MF	GAS LINE CHAMBER 1 (PROCESS) M
Part Number: 0050-20064	Part Number: 0050-20065	Part Number: 0050-20066

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