SPIRE Technical Solutions


Weldment, 8" Hoop, PVD W/B Chamber	Line Lift purge in chamber A/B	Line Reducer ¼-1/2 3300-0214
Part Number: 0041-30416	Part Number: 0050-06431	Part Number: 0050-07294


TUBE WELDMENT CAP MAN	Turbo Purge Tube Weldment	FTG Pipe Flg NW40 x NW40 11"
Part Number: 0050-09057	Part Number: 0050-09058	Part Number: 0050-09217


Manometer Weldment	Manifold pedestal cool down 6 inch	GAS LINE CHAMBER 1 (HEATER) MF
Part Number: 0050-10146	Part Number: 0050-20004	Part Number: 0050-20064


GAS LINE CHAMBER 1 (HEATER) MF	GAS LINE CHAMBER 1 (PROCESS) M	Std Heater Gasline Mix
Part Number: 0050-20065	Part Number: 0050-20066	Part Number: 0050-20236

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