SPIRE Technical Solutions


Arm source weldment Standard chamber	Pressure adapter standard	Adaptor, turbo preclean interf
Part Number: 0040-20006	Part Number: 0040-20025	Part Number: 0040-20033


Adjustable AR feedthru	Adaptor elbow 0.25 VCR to mini CF	Bellows lifter pvd
Part Number: 0040-20055	Part Number: 0040-20056	Part Number: 0040-20068-U


Endura Kick plate	Slow pump W/PPLE	Manifold, Source Swivel Water
Part Number: 0040-20090	Part Number: 0040-20125	Part Number: 0040-20136


Bellows, Wafer Orienter	Bracket VCR cross	Bellows 101% TiN coverage
Part Number: 0040-20146	Part Number: 0040-20165	Part Number: 0040-20194

Used