SPIRE Technical Solutions


Bellows, Wafer Orienter	Bracket VCR cross	Bellows 101% TiN coverage
Part Number: 0040-20146	Part Number: 0040-20165	Part Number: 0040-20194


Wide Body PVD Chamber	Elbow KF25, ¼ VCR Male	Assy, Lift Hoop 8" Wide Body
Part Number: 0040-20195	Part Number: 0040-20198	Part Number: 0040-20257


Short Feed Lamp	SLIT VALVE BELLOWS	Spool exhaust transfer chamber
Part Number: 0040-20292-U	Part Number: 0040-20418-U	Part Number: 0040-20433


Adptr Rough Line Cryo, PVD Degas	Bracket Flow Meter Neslab	Bracket , Shipping HTESC
Part Number: 0040-20524	Part Number: 0040-20973	Part Number: 0040-21675

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