SPIRE Technical Solutions


COVER, CHAMBER A/B POSITON	HOUSING SHUTTER	Blank, shutter
Part Number: 0021-70280	Part Number: 0021-70379	Part Number: 0021-70380


ADAPTER, STANDOFF, EARTHQUAKE, CENTURA	Cover, Housing, Motorized Lift, ESC Compatible	Universal MFC mounting block
Part Number: 0021-76439	Part Number: 0021-76693	Part Number: 0030-00026


Mounting block, shut off valve	Cover pulley source basic	Cover source 11.30"
Part Number: 0030-00027	Part Number: 0030-20002	Part Number: 0030-20007


Slit valve mounting block	Bakeout lamp housing	AC cover low temp ESC ground block
Part Number: 0030-70048	Part Number: 0040-00749	Part Number: 0040-00959

Used