SPIRE Technical Solutions


Cover, window PVD chamber	Brkt, PCB, Turbo Interconnect	BRKT, connector, MTRZD lift
Part Number: 0020-70500	Part Number: 0020-70536	Part Number: 0020-70554


Panel, Rear Bulkhead, Pri Gen Rack	H2O Panel Semi S2 Gen Rack	BRKT, MT, STATUS LMP
Part Number: 0020-70598	Part Number: 0020-70600	Part Number: 0020-70633


Slit Valve Centura Anodized Door	Adapter, Chamber orienter, E,F	Chamber interconnect cover WB
Part Number: 0020-70643	Part Number: 0020-70779	Part Number: 0020-70821


Bracket, common connector	CHE,F COVER	Wafer C lexan viewport
Part Number: 0020-70822	Part Number: 0020-70823	Part Number: 0020-75093

Used