SPIRE Technical Solutions


Bar tie–off standard chamber	WB chamber harness support	Cover, window PVD chamber
Part Number: 0020-70480	Part Number: 0020-70481	Part Number: 0020-70500


Brkt, PCB, Turbo Interconnect	BRKT, connector, MTRZD lift	Panel, Rear Bulkhead, Pri Gen Rack
Part Number: 0020-70536	Part Number: 0020-70554	Part Number: 0020-70598


H2O Panel Semi S2 Gen Rack	BRKT, MT, STATUS LMP	Slit Valve Centura Anodized Door
Part Number: 0020-70600	Part Number: 0020-70633	Part Number: 0020-70643


Adapter, Chamber orienter, E,F	Chamber interconnect cover WB	Bracket, common connector
Part Number: 0020-70779	Part Number: 0020-70821	Part Number: 0020-70822

Used